LPCVD
دستگاه LPCVD از رکن های اصلی آزمایشگاه هایی است که در زمینه ی نانوالکترونیک و یا سیستم های الکترومکانیکی فعالیت می کنند می باشد. لایه ی پلی سیلیکان هم به عنوان گیت ترانزیستورها به کار می رود و هم به عنوان لایه ی قربانی در فرآیندهای ماشین کاری بدنه. برای زدایش کامل قرص سیلیکان و ایجاد غشاء سیلیکانی نیاز به لایه ی محافظ نایتراید سیلیکان می باشد. اکسید سیلیکان نیز که از اجزای اصلی پروسه های MEMS می باشد.
با توجه به کاربردهای وسیع این دستگاه, اولین نمونه ی آن در اختیار آزمایشگاه نانوالکترونیک دانشگاه تهران قرار گرفت.
برای سفارش محصول و دریافت اطلاعات بیشتر به اینجا مراجعه نمایید.
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