DC-PECVD
سیستم لایه نشانی بخار شیمیایی با پلاسمای مستقیم
یکی از روش های رشد عمودی نانولوله های کربنی, استفاده از سیستم لایه نشانی بخار شیمیایی با پلاسمای مستقیم (DC-PECVD) است. شرکت حسگرسازان دارای تجربهای شش ساله در طراحی و ساخت این دستگاه به صورت اختصاصی برای رشد نانولوله است. نمونه اوليه اين دستگاه در آزمايشگاه لايه نازک دانشگاه تهران (دانشکده مهندسی برق و کامپيوتر) موجود می باشد.
نمونه های جدید این دستگاه دارای سیستم کنترل کامپیوتری است که به محقق این امکان را می دهد که پروسه ها و فرآیندهای پیچیده تری را طراحی و پیاده سازی کند.
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